1.

Conference Proceedings
Conference Proceedings
1. COMPARISON OF SHORT TIME ANNEALING OF IMPLANTED SILICON LAYERS WITH TUNGSTEN-HALOGEN LAMP AND MERCURY ARC LAMP SOURCES
Wouters, D. ; Avau, D. ; Mertens, P. ; Maes, H.E.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.217-224,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. New Developments in Non-Volatile Semiconductor Memory Technologies and Devices
Maes, H.E. ; Groeseneken, G.L. ; Wittters, J.
Pub. info.: Proceedings of the ESA Electronic Components Conference, held at the Conference Centre, ESTEC, Noordwijk, the Netherlands, 12-16 November 1990.  pp.31-42,  1991.  Paris.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 313
3.

Conference Proceedings
Conference Proceedings
3. Technology Challenges Related to Ultimate CMOS and the End-of-Roadmap Microelectronics
Claeys, C.L. ; Maes, H.E.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.455-470,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
4.

Conference Proceedings
Conference Proceedings
4. Analysis of Process-Induced Stresses in Lateral Trench Isolation Structures for High Voltage Devices in Bonded SOI Wafers
Baumgart, H. ; Letavic, T.J. ; Wolf, I.De. ; Tsou, L. ; Maes, H.E. ; Egloff, R.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.440-454,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7