1.

Conference Proceedings

Conference Proceedings
M. T. Postek ; K. Lyons
Pub. info.: Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6648
2.

Conference Proceedings

Conference Proceedings
M. T. Postek ; A. E. Vladar ; J. Kramar ; L. A. Stern ; J. Notte ; S. McVey
Pub. info.: Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6648
3.

Conference Proceedings

Conference Proceedings
M. T. Postek ; A. E. Vladár
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69220B-1-69220B-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
4.

Conference Proceedings

Conference Proceedings
A. E. Vladár ; K. P. Purushotham ; M. T. Postek
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.692217-1-692217-5,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
5.

Conference Proceedings

Conference Proceedings
A. E. Vladár ; J. S. Villarrubia ; P. Cizmar ; M. Oral ; M. T. Postek
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69220H-1-69220H-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
6.

Conference Proceedings

Conference Proceedings
M. T. Postek ; A. Vladar ; J. Dagata ; N. Farkas ; B. Ming
Pub. info.: Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA.  pp.70420D-1-70420D-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7042
7.

Conference Proceedings

Conference Proceedings
K. W. Lyons ; M. T. Postek
Pub. info.: Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA.  pp.704202-1-704202-13,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7042