Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
M. T. Postek ; A. E. Vladar ; J. Kramar ; L. A. Stern ; J. Notte ; S. McVey
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Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Metrology, inspection, and process control for microlithography XXII. 1 pp.69220B-1-69220B-7, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Metrology, inspection, and process control for microlithography XXII. 1 pp.692217-1-692217-5, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
A. E. Vladár ; J. S. Villarrubia ; P. Cizmar ; M. Oral ; M. T. Postek
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Metrology, inspection, and process control for microlithography XXII. 1 pp.69220H-1-69220H-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
M. T. Postek ; A. Vladar ; J. Dagata ; N. Farkas ; B. Ming
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Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA. pp.70420D-1-70420D-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA. pp.704202-1-704202-13, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering