1.

Conference Proceedings
Conference Proceedings
1. SEM and ECC Imaging Study of Step-Bunched Structure on 4H-SiC Epitaxial Layers
Y. Tabuchi ; M. Sonoda ; K. Ashida ; T. Kaneko ; N. Ohtani ; M. Katsuno ; S. Sato ; H. Tsuge ; T. Fujimoto
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.205-208,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897
2.

Conference Proceedings
Conference Proceedings
2. Immersion lithography bevel solutions
L. Tedeschi ; O. Tornado ; M. Sonoda ; S. Yasuda ; M. Asai
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.692206-1-692206-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
3.

Conference Proceedings
Conference Proceedings
3. Film stacking architecture for immersion lithography process
T. Goto ; M. Sonoda ; T. Miyagi ; K. Shigemori ; M. Kanaoka
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.69222X-1-69222X-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922