1.

Conference Proceedings

Conference Proceedings
M. Plat ; W.R. Brunsvold ; R.S. Smith ; N.K. Eib ; C.F. Lyons
Pub. info.: Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California.  pp.272-281,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2438
2.

Conference Proceedings

Conference Proceedings
T. Wallow ; M. Plat ; Z. Zhang ; B. MacDonald ; J. Bernard ; J. Romero ; B. L. Fontaine ; H. J. Levinson
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519