1.

Conference Proceedings

Conference Proceedings
S. Matsunari ; T. Aoki ; K. Murakami ; Y. Gomei ; S. Terashima ; H. Takase ; M. Tanabe ; Y. Watanabe ; Y. Kakutani ; M. Niibe ; Y. Fukuda
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
2.

Conference Proceedings

Conference Proceedings
Y. Kakutani ; M. Niibe ; Y. Gomei ; H. Takase ; S. Terashima ; S. Matsunari ; T. Aoki ; Y. Fukuda
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
3.

Conference Proceedings

Conference Proceedings
K. Koida ; M. Niibe ; Y. Kakutani ; S. Matsunari ; T. Aoki
Pub. info.: Emerging lithographic technologies XII.  2  pp.69213C-1-69213C-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921