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11 results

Conference Proceedings

1. Metal-Insulator-Gap-Insulator-Semiconductor structure for Biological Sensors

H. Hashimoto ; T. Hirokane ; D. Kanzaki ; S. Urabe ; M. Morita

Pub. info.:	Sensor Arrays and Multi-Dimensional Sensor Systems. pp.7-13, 2008. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	11(16)

Conference Proceedings

2. Characterization of Tunneling Current Through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method

N. Yoshii ; T. Okazaki ; T. Hirokane ; S. Urabe ; K. Nishimura ; S. Morita ; M. Morita

Pub. info.:	Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5. pp.277-282, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	1(1)

Conference Proceedings

3. Photodetection Characteristics of SnO₂-Ultrathin SiO₂-Si Structures

M. Chikamoto ; H. Hashimoto ; K. Horikoshi ; A. Shinozaki ; S. Morita ; K. Arima ; J. Uchikoshi ; M. Morita

Pub. info.:	Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5. pp.97-102, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	1(1)

Conference Proceedings

4. Quantitative Analysis of Reaction of Hydrogen-Terminated Si(100) with Oxygen during Heating

S. Urabe ; K. Nishimura ; S. Nishikawa ; S. Morita ; M. Morita

Pub. info.:	Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5. pp.61-68, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	1(1)

Conference Proceedings

5. High Reliability of Ultraclean Oxide Films

M. Morita ; K. Nakamura ; A. Teramoto ; K. Makihara ; T. Ohmi

Pub. info.:	Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials. pp.451-460, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-25

Conference Proceedings

6. Selective Tungsten Deposition Using Cold Susceptor

Y. Maeda ; H. Suzuki ; T. Sakoh ; K. Morita ; M. Morita ; T. Ohmi

Pub. info.:	Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials. pp.179-189, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-25

Conference Proceedings

7. Carbon and Its Related Materials as Negative Electrodes for Rechargeable Lithium Batteries

Y. Matsuda ; M. Morita ; M. Ishikawa

Pub. info.:	Proceedings of the Symposium on New Sealed Rechargeable Batteries and Supercapacitors. pp.206-217, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-23

Conference Proceedings

8. New Electric Double-Layer Capacitors Using Polymer Solid Electrolytes Containing Tetraalkylammonium Salts

M. Ishikawa ; M. Morita ; M. Ihara ; Y. Matsuda

Pub. info.:	Proceedings of the Symposium on New Sealed Rechargeable Batteries and Supercapacitors. pp.99-109, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-23

Conference Proceedings

9. Synthesis of novel alpha-fluoroacrylates and related polymers for immersion lithography

T. Yamashita ; T. Ishikawa ; M. Morita ; T. Kanemura ; H. Aoyama

Pub. info.:	Advances in resist materials and processing technology XXV. 1 pp.69231Z-1-69231Z-7, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6923

10.

Conference Proceedings

10. Design and analysis of micro-stirrer for thrombus dissolution

M. Morita ; Z. Jiang ; N. Chijimatsu

Pub. info.:	ICMIT 2007, mechatronics, MEMS, and smart materials. 2 pp.67943I-1-67943I-6, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6794

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