1.

Conference Proceedings

Conference Proceedings
Y. Liu ; E. Sugimata ; T. Matsukawa ; M. Masahara ; K. Endo ; I. Kenichi ; T. Shimizu ; H. Yamauchi ; S. Ouchi ; E. Suzuki
Pub. info.: Dielectrics for nanosystems II: materials science, processing, reliability, and manufacturing.  pp.197-208,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(1)
2.

Conference Proceedings

Conference Proceedings
E. Suzuki ; Y. Liu ; K. Endo ; T. Matsukawa ; M. Masahara
Pub. info.: ULSI process integration 5.  pp.339-348,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)
3.

Conference Proceedings

Conference Proceedings
Y. Liu ; T. Matsukawa ; K. Endo ; M. Masahara ; S. Ouchi
Pub. info.: Dielectrics for nanosystems 3: materials science, processing, reliability, and manufacturing.  pp.239-252,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 13(2)
4.

Conference Proceedings

Conference Proceedings
K. Endo ; Y. Liu ; M. Masahara ; T. Maisukawa ; S. O'uchi ; E. Suzuki
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.71-82,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)