1.

Conference Proceedings
Conference Proceedings
1. High-index immersion lithography with second-generation immersion fluids to enable numerical aperatures of 1.55 for cost effective 32-nm half pitches
R. H. French ; V. Liberman ; H. V. Tran ; J. Feldman ; D. J. Adelman ; R. C. Wheland ; W. Qiu ; S. J. McLain ; O. Nagao ; M. Kaku ; M. Mocella ; M. K. Yang ; M. F. Lemon ; L. Brubaker ; A. L. Shoe ; B. Fones ; B. E. Fischel ; K. Krohn ; D. Hardy ; C. Y. Chen
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. High-index immersion fluids enabling cost-effective single-exposure lithography for 32 nm half pitches
R. H. French ; H. V. Tran ; D. J. Adelman ; N. S. Rogado ; M. Kaku
Pub. info.: Optical Microlithography XXI.  1  pp.692417-1-692417-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
3.

Conference Proceedings
Conference Proceedings
3. EUV and debris characteristics of a laser-plasma tin dioxide nano-particle colloidal jet target
M. Kaku ; S. Suetake ; Y. Senba ; M. Katto
Pub. info.: Emerging lithographic technologies XII.  2  pp.69212Y-1-69212Y-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
4.

Conference Proceedings
Conference Proceedings
4. Harmonics generation in VUV spectral region driven by a NIR Ti:sapphire laser in rare gases
M. Katto ; K. Oda ; M. Kaku ; S. Kubodera ; A. Yokotani
Pub. info.: XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers : 15-19 September 2008, Lisboa, Portugal.  pp.713118-1-713118-5,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7131
5.

Conference Proceedings
Conference Proceedings
5. OFI argon excimer amplifier for intense subpicosecond VUV pulse generation
M. Kaku ; S. Kubodera ; K. Oda ; M. Katto ; A. Yokotani
Pub. info.: XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers : 15-19 September 2008, Lisboa, Portugal.  pp.71311C-1-71311C-6,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7131
6.

Conference Proceedings
Conference Proceedings
6. EUV and debris characteristics of a laser-plasma tin-dioxide colloidal target
S. Kubodera ; M. Kaku ; S. Touge ; M. Katto
Pub. info.: XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers : 15-19 September 2008, Lisboa, Portugal.  pp.71311O-1-71311O-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7131
7.

Conference Proceedings
Conference Proceedings
7. High-intensity subpicosecond vacuum ultraviolet laser system
S. Kubodera ; M. Kaku ; Y. Taniguchi ; M. Katto ; A. Yokotani
Pub. info.: High energy/average power lasers and intense beam applications II : 21-22 January 2008, San Jose, California, USA.  pp.68740L-1-68740L-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6874