1.

Conference Proceedings
Conference Proceedings
1. Tapping Performance by Use of Strong Alkali Ion Water
M. Iwai ; M. Yamada ; K. Suzuki
Pub. info.: Advances in Abrasive Technology XIX.  pp.492-496,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 874
2.

Conference Proceedings
Conference Proceedings
2. Development of a PCD Burnishing Tool and its Burnishing Performance
M. Iwai ; M. Yamada ; P. Chen ; B. Lin ; K. Suzuki
Pub. info.: Advances in Abrasive Technology XIX.  pp.59-63,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 874
3.

Conference Proceedings
Conference Proceedings
3. Performance of immersion lithography for 45-nm-node CMOS and ultra-high density SRAM with 0.25um2
S. Mimotogi ; F. Uesawa ; M. Tominaga ; H. Fujise ; K. Sho ; M. Katsumata ; H. Hane ; A. Ikegami ; S. Nagahara ; T. Ema ; M. Asano ; H. Kanai ; T. Kimura ; M. Iwai
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520