1.

Conference Proceedings
Conference Proceedings
1. Wafer Strength and Slip Generation Behavior in 300mm Wafers
T. Ono ; W. Sugimura ; T. Kihara ; M. Hourai
Pub. info.: Silicon materials science and technology X.  pp.109-122,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(2)
2.

Conference Proceedings
Conference Proceedings
2. Defect Formation Behaviors in Heavily Doped Czochralski Silicon
W. Sugimura ; T. Ono ; S. Umeno ; M. Hourai ; K. Sueoka
Pub. info.: Silicon materials science and technology X.  pp.95-108,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(2)