C. S. Saravanan ; S. Nirmalgandhi ; O. Kritsun ; A. Acheta ; R. Sandberg ; B. L. Fontaine ; H. J. Levinson ; K. Lensing ; M. Dusa ; J. Hauschild ; A. Pici
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Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
O. Kritsun ; B. L. Fontaine ; R. Sandberg ; A. Acheta ; H. J. Levinson ; K. Lensing ; M. Dusa ; J. Hauschild ; A. Pici ; C. Saravanan ; K. Primak ; R. Korlahalli ; S. Nirmalgandhi
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Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
M. Dusa ; J. Quaedackers ; O. F. A. Larsen ; J. Meessen ; E. van der Heijden ; G. Dicker ; O. Wismans ; P. de Haas ; K. van I. Schenau ; J. Finders ; B. Vleeming ; G. Storms ; P. Jaenen ; S. Cheng ; M. Maenhoudt
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Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
M. Dusa ; B. Arnold ; J. Finders ; H. Meiling ; K. van Ingen Schenau
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Photomask and next-generation lithography mask technology XV. 1 pp.702810-1-702810-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
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Proceedings of SPIE - the International Society for Optical Engineering
A. Nackaerts ; S. Verhaegen ; M. Dusa ; H. Kattouw ; F. van Bilsen ; S. Biesemans ; G. Vandenberghe
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Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering