1.

Conference Proceedings

Conference Proceedings
K. Bubke ; E. Cotte ; J. H. Peters ; R. de Kruif ; M. Dusa
Pub. info.: Photomask technology 2007.  1  pp.67301H-1-67301H-10,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
2.

Conference Proceedings

Conference Proceedings
M. Dusa ; J. Quaedackers ; O. F. A. Larsen ; J. Meessen ; E. van der Heijden ; G. Dicker ; O. Wismans ; P. de Haas ; K. van I. Schenau ; J. Finders ; B. Vleeming ; G. Storms ; P. Jaenen ; S. Cheng ; M. Maenhoudt
Pub. info.: Optical microlithography XX.  6520  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings

Conference Proceedings
O. Kritsun ; B. L. Fontaine ; R. Sandberg ; A. Acheta ; H. J. Levinson ; K. Lensing ; M. Dusa ; J. Hauschild ; A. Pici ; C. Saravanan ; K. Primak ; R. Korlahalli ; S. Nirmalgandhi
Pub. info.: Optical microlithography XX.  6520  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
4.

Conference Proceedings

Conference Proceedings
A. Nackaerts ; S. Verhaegen ; M. Dusa ; H. Kattouw ; F. van Bilsen ; S. Biesemans ; G. Vandenberghe
Pub. info.: Design for manufacturability through design-process integration.  6521  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
5.

Conference Proceedings

Conference Proceedings
C. S. Saravanan ; S. Nirmalgandhi ; O. Kritsun ; A. Acheta ; R. Sandberg ; B. L. Fontaine ; H. J. Levinson ; K. Lensing ; M. Dusa ; J. Hauschild ; A. Pici
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  6518  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
6.

Conference Proceedings

Conference Proceedings
E. van Setten ; A. Engelen ; J. Finders ; M. Dusa
Pub. info.: 23rd European Mask and Lithography Conference.  6533  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533
7.

Conference Proceedings

Conference Proceedings
W. H. Arnold ; M. Dusa ; J. Flinders
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  6518  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
8.

Conference Proceedings

Conference Proceedings
M. Dusa ; B. Arnold ; J. Finders ; H. Meiling ; K. van Ingen Schenau
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.702810-1-702810-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
9.

Conference Proceedings

Conference Proceedings
S. Verhaegen ; S. Cosemans ; M. Dusa ; P. Marchal ; A. Nackaerts
Pub. info.: Design for manufacturability through design-process integration II.  pp.69250R-1-69250R-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6925
10.

Conference Proceedings

Conference Proceedings
E. van Setten ; O. Wismans ; K. Grim ; J. Finders ; M. Dusa
Pub. info.: Optical Microlithography XXI.  3  pp.69244I-1-69244I-14,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924