1.

Conference Proceedings

Conference Proceedings
Economou, D.J. ; Wise, R.S. ; Lymberopoulos, D.P.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.11-19,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Conference Proceedings

Conference Proceedings
Economou, D. ; Lymberopoulos, D.P.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.471-482,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6