1.

Conference Proceedings
Conference Proceedings
1. Selective Remote Plasma Etching of Si3N4 Over SIO2 at Elevated Temperature
Staffa, J. ; Luther, B. ; Hwang, D. ; Ruzyllo, J. ; Grant, R. ; March, D.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.283-289,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5
2.

Conference Proceedings
Conference Proceedings
2. Investigation of damage threshold of ion beam deposited oxide thin film optics for high-peak-power short-pulse lasers
Fitzgerald Dummer, A. M. ; Brizuela, F. ; Duskis, C. ; Luther, B. ; Larotonda, M. ; Rocca, J. J. ; George, J. ; Kohil, S. ; McCurdy, P. ; Menoni, C. S.
Pub. info.: Advances in thin film coatings for optical applications : 4-5 August 2004, Denver, Colorado, USA.  pp.93-97,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5527