1.

Conference Proceedings
Conference Proceedings
1. 3D finite element modeling of the micromachined microphone with corrugated diaphragm
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Korshunov,A.V. ; Akulshin,Y.D. ; Sabadash,V.O. ; Smolnikov,B.A.
Pub. info.: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.355-360,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4348
2.

Conference Proceedings
Conference Proceedings
2. "Micronozzles: 3D numerical structural and gas dynamics modeling, fabrication, and preliminary experimental results"
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Korshunov,A.V. ; Akulshin,Y.D. ; Dolganov,A.G. ; Sabadash,V.O.
Pub. info.: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.348-354,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4348
3.

Conference Proceedings
Conference Proceedings
3. Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Pereyaslavets,E.V. ; Lunev,V.P. ; Kazakin,A.N. ; Popova,I.V. ; Lestiev,A.M.
Pub. info.: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.361-368,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4348
4.

Conference Proceedings
Conference Proceedings
4. 3D finite element modeling of micromachined pressure sensor
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Akulshin,Y.D. ; Pereyaslavets,E.V.
Pub. info.: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.338-347,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4348
5.

Conference Proceedings
Conference Proceedings
5. 3D finite element modeling of micromachined catheter with corrugated diaphragm
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Akulshin,Y.D. ; Pereyaslavets,E.V.
Pub. info.: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.369-374,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4348
6.

Conference Proceedings
Conference Proceedings
6. Some aspect of MEMS technology
Pyatishev,E.N. ; Lurie,M.S. ; Popova,I.V.
Pub. info.: Fourth all-russian seminar on problems of theoretical and applied electron optics : 21-22 October 1999, Moscow, Russia.  pp.66-69,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4187