1.

Conference Proceedings

Conference Proceedings
Paulsson, A. ; Xing, K. ; Fosshaug, H. ; Lundvall, A. ; Bjornberg, C. ; Karlsson, J.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.527-536,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings

Conference Proceedings
Karlsson, J. O. ; Xing, K. ; Bajramovic, A. ; Dahlberg, H. ; Bjornberg, C. ; Hogfeldt, P. ; Kjellberg, L. ; Fosshaug, H. ; Dahlberg, A. ; Lundvall, A.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.234-244,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
3.

Conference Proceedings

Conference Proceedings
Xing, K. ; Karlsson, J. ; Paulson, A. ; Bjornberg, C. ; Lundvall, A. ; Hogfeldt, P. ; Vedenpaa, J. ; Goodoree, R. ; Bjuggren, M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.31-41,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
4.

Conference Proceedings

Conference Proceedings
Lundvall, A. ; Lindstroem, T. ; Nikolajeff, F.K.
Pub. info.: Micromachining Technology for Micro-Optics and Nano-Optics.  pp.118-127,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4984