1.

Conference Proceedings

Conference Proceedings
Nelson,B.N. ; Slebodnick,P. ; Lemieux,E.J. ; Singleton,W. ; Krupa,M. ; Lucas,K. ; Thomas,E.D. ; Seelinger,A.
Pub. info.: Wavelet applications VIII : 18-20 April 2001, Orlando, USA.  pp.134-145,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4391
2.

Conference Proceedings

Conference Proceedings
Driessche,V.Van ; Lucas,K. ; Roey,F.Van ; Grozev,G. ; Tzviatkov,P.
Pub. info.: Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK.  pp.396-407,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4404
3.

Conference Proceedings

Conference Proceedings
Allgair,J.A. ; Ivy,M. ; Lucas,K. ; Sturtevant,J.L. ; Elliott,R.C. ; Mack,C.A. ; MacNaughton,C.W. ; Miller,J.D. ; Pochkowski,M. ; Preil,M.E. ; Robinson,J.C. ; Santos,F.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.200-207,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
4.

Conference Proceedings

Conference Proceedings
Postnikov,S.V. ; Lucas,K. ; Wimmer,K.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.797-808,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344