1.

Conference Proceedings
Conference Proceedings
1. RAPID THERMAL ANNEALING OF DEPOSITED SiO2 FILMS
Wong, J. ; Lu, T-M. ; Cohen, S. S. ; Mehta, S.
Pub. info.: Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.515-522,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 35
2.

Conference Proceedings
Conference Proceedings
2. CHARACTERIZATION OF SURFACE DEFECT STRUCTURE BY LOW ENERGY ELECTRON DIFFRACTION
Wendelken, J. F. ; Wang, G-C. ; Pimbley, J. M ; Lu, T-M.
Pub. info.: Advanced photon and particle techniques for the characterization of defects in solids : symposium held November 27-29, 1984, Boston, Massachusetts, U.S.A..  pp.171-178,  1985.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 41
3.

Conference Proceedings
Conference Proceedings
3. Diffusion Barriers for Fluorinated Low-k Dielectrics
DelaRosa, M. ; Kumar, A. ; Bakhru, H. ; Lu, T-M.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.559-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
4.

Conference Proceedings
Conference Proceedings
4. X-ray Photoelectron Spectroscopic Studies of Cu-Al alloy/SiO2 Interfaces
Wang, P-I. ; Yang, G-R. ; Murarka, S. P. ; Lu, T-M.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.347-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
5.

Conference Proceedings
Conference Proceedings
5. Diffusion Barriers for Fluorinated Low-K Dielectrics
Bakhru, H. ; DelaRosa, M. ; Kumar, A. ; Lu, T-M.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.197-202,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565
6.

Conference Proceedings
Conference Proceedings
6. Characterization of Cu-Al Alloy/SiO2 Interface Microstructure
Wang, Pei-I. ; Murarka, S.P. ; Yang, G-R. ; Barnat, E. ; Lu, T-M. ; Chen, Y-C. ; Li, Xiang ; Rajan, K.
Pub. info.: Polycrystalline metal and magnetic thin films-2000 : symposium held April 25-27, 2000, San Francisco, California, U.S.A..  pp.G7.5/D10.5-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 615