1.

Conference Proceedings

Conference Proceedings
Yang, M. ; Lin, F. ; Yang, E. ; Yang, T. H. ; Chen, K. C. ; Ku, J. ; Lu, C. Y.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1437-1448,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings

Conference Proceedings
Lu, C. Y. ; Tung, C. H. ; Pey, K. L.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.404-417,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
3.

Conference Proceedings

Conference Proceedings
Huang, V. ; Wu, T. S. ; Yang, M. ; Lin, F. ; Yang, E. ; Yang, T. H. ; Chen, K. C. ; Ku, J. ; Lu, C. Y.
Pub. info.: Optical Microlithography XIX.  pp.61543Q-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154