Loxley, N. ; Cockerton, S. ; Cooke, L. M. ; Gray, T. ; Tanner, B. K. ; Bowen, D. K.
Pub. info.:
Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.451-, 1994. Pittsburgh. MRS - Materials Research Society
Pina, L. ; Innerman, A.V. ; Hudec, R. ; Ticha, H. ; Arndt, U.W. ; Loxley, N. ; Fraser, G. ; Taylor, M. ; Wall, J.
Pub. info.:
Advances in laboratory-based X-ray sources and optics III : 8 July, 2002, Seattle, Washington, USA. pp.119-130, 2002. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering