1.

Conference Proceedings
Conference Proceedings
1. Rigorous coupled-wave analysis for two-dimensional gratings [5972-26]
Logofatu, P.C.
Pub. info.: Advanced topics in optoelectronics, microelectronics, and nanotechnologies II : 24-26 November, 2004, Bucharest, Romania.  pp.59720Q-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5972
2.

Conference Proceedings
Conference Proceedings
2. Absolute measurement of length with nanometric resolution [5972-20]
Apostol, D. ; Garoi, F. ; Timcu, A. ; Damian, V. ; Logofatu, P.C. ; Nascov, V.
Pub. info.: Advanced topics in optoelectronics, microelectronics, and nanotechnologies II : 24-26 November, 2004, Bucharest, Romania.  pp.59720K-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5972
3.

Conference Proceedings
Conference Proceedings
3. Interferogram analysis for flatness metrology [5972-48]
Nascov, V. ; Timcu, A. ; Apostol, D. ; Garoi, F. ; Damian, V. ; Iordache, I. ; Logofatu, P.C.
Pub. info.: Advanced topics in optoelectronics, microelectronics, and nanotechnologies II : 24-26 November, 2004, Bucharest, Romania.  pp.59721C-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5972
4.

Conference Proceedings
Conference Proceedings
4. Application of optical scatterometry to microelectronics and flat panel display processing
McNeil, J.R. ; Coulombe, S.A. ; Logofatu, P.C. ; Raymond, Christopher J. ; Naqvi, Sohail H. ; Collins, G.J.
Pub. info.: Scattering and surface roughness II : 21-23 July 1998, San Diego, California.  pp.202-212,  1998.  Bellingham, Wash..  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3426
5.

Conference Proceedings
Conference Proceedings
5. UV scatterometry
Logofatu, P.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.208-214,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038