SOL-GEL DEPOSITION PROCESSES OF THIN CERAMIC FILMS
- Author(s):
- Publication title:
- Chemical physics of thin film deposition processes for micro- and nano-technologies
- Title of ser.:
- NATO science series. Series 2, Mathematics, physics and chemistry
- Ser. no.:
- 55
- Pub. Year:
- 2002
- Page(from):
- 69
- Page(to):
- 90
- Pages:
- 22
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402005244 [1402005245]
- Language:
- English
- Call no.:
- N17050/55
- Type:
- Conference Proceedings
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