1.

Conference Proceedings
Conference Proceedings
1. Statistical Validation of a RTDC Algorithm for Shallow Trench Isolation Post-CMP Micro-scratch Detection and Classification Using a Laser Scanning Surface System
Lodi, D. ; Caputo, D. ; Lorenzi, G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.321-329,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
2.

Conference Proceedings
Conference Proceedings
2. THE ST CLEAN DUAL STEP CLEANING CONCEPT
Bellandi, R. ; Alessandri, M. ; Lodi, D. ; Pipia, F.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.25-29,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
3.

Conference Proceedings
Conference Proceedings
3. CARRIER INDUCED SILICON PITTING IN THE HF-RCA CLEANING SEQUENCES
Lodi, D. ; Bellandi, E. ; Ninni, R.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.173-179,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
4.

Conference Proceedings
Conference Proceedings
4. Recent theoretical and experimental results on inertial fusion energy physics
Velarde, G. ; Perlado, J.M. ; Alonso, M. ; Bravo, E. ; Cabellos, O. ; Dominguez, E. ; Eliezer, S. ; Falquina, R. ; Rubiano, J.G. ; Gil, J.M. ; del Rio, J.G. ; Gonzalez, A.I. ; Leon, P.T. ; Lodi, D. ; Marian, J. ; Martel, P. ; Martinez-Val, J.M. ; Minguez, E. ; Ogando, F. ; Piera, M. ; Prieto, J. ; Relano, A. ; Reyes, S. ; Rodriguez, A. ; Rodriguez, R. ; Salvador, M. ; Sanz, J.L. ; Senz, D.G. ; Sauvan, P. ; Velarde, M. ; Velarde, P.
Pub. info.: ECLIM 2002 : 27th European Conference on Laser Interaction with Matter : 7-11 October 2002, Moscow, Russia.  pp.196-206,  2003.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5228
5.

Conference Proceedings
Conference Proceedings
5. PREVENTION OF Si ETCHING IN DILUTED SC1 SOLUTIONS
Bellandi, E. ; Alessandri, M. ; Lodi, D. ; Strada, M. ; Pipia, S. ; Petitdidier, S. ; Levy, D.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.337-344,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
6.

Conference Proceedings
Conference Proceedings
6. EFFECT OF WAFER BACKSIDE ON PARTICLE ADDITION BEHAVIOUR OF HF-RCA SEQUENCE
Strada, M. ; Lodi, D. ; Bellandi, E. ; Alessandri, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.172-179,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
7.

Conference Proceedings
Conference Proceedings
7. Post-CMP Defect Detection: Set-up and Validation of a Recipe for Surface Scanning Laser Systems
Lodi, D. ; Caputo, D. ; Loreuzi, G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.233-244,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
8.

Conference Proceedings
Conference Proceedings
8. Pulse Frerquency Effect on Neutron Damage in α-Iron: A KMC Analysis
Perlado, J.M. ; Lodi, D. ; Dominguez, E. ; Ogando, F. ; Prieto, J. ; Rubia, T. Diaz de la ; Caturla, M.J.
Pub. info.: Advances in materials theory and modeling--bridging over multiple-length and time scales : symposium held April 16-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 677
9.

Conference Proceedings
Conference Proceedings
9. Computer simulation of the effect of copper on defect production and damage evolution in ferritic steels
Perlado, J. M. ; Marian, J. ; Lodi, D. ; Rubia, T. Diaz de la
Pub. info.: Multiscale phenomena in materials - experiments and modeling : sympoisum held November 30-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.243-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 578