Customized off-axis illumination aperture filtering for sub-0.18-ヲフm KrF Lithography
- Author(s):
Hsia,C.-C. ( Industrial Technology Research Institute ) Gau,T.-S. Yang,C.-H. Liu,R.-C. Chang,C.-H. Chen,L.-J. Wang,C.-M. Chen,J.F. Smith,B.W. Hwang,G.-W. Lay,J.-W. Goang,D.-Y. - Publication title:
- Optical microlithography XII : 17-19 March 1999, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3679
- Pub. Year:
- 1999
- Vol.:
- Part1
- Page(from):
- 427
- Page(to):
- 434
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431530 [0819431532]
- Language:
- English
- Call no.:
- P63600/3679
- Type:
- Conference Proceedings
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