Blank Cover Image

Customized off-axis illumination aperture filtering for sub-0.18-ヲフm KrF Lithography

Author(s):
Hsia,C.-C. ( Industrial Technology Research Institute )
Gau,T.-S.
Yang,C.-H.
Liu,R.-C.
Chang,C.-H.
Chen,L.-J.
Wang,C.-M.
Chen,J.F.
Smith,B.W.
Hwang,G.-W.
Lay,J.-W.
Goang,D.-Y.
7 more
Publication title:
Optical microlithography XII : 17-19 March 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3679
Pub. Year:
1999
Vol.:
Part1
Page(from):
427
Page(to):
434
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431530 [0819431532]
Language:
English
Call no.:
P63600/3679
Type:
Conference Proceedings

Similar Items:

Chou,S.-Y., Wang,C.-M., Hsia,C.-C., Chen,L.-J., Hwang,G.-W., Lee,S.-D., Lou,J.-C.

SPIE - The International Society for Optical Engineering

Chen,C.P.A., Lin,F., Yang,T.H.

SPIE - The International Society for Optical Engineering

Gau,T.-S., Liu,R.-G., Chen,C.-K., Lai,C.-M., Liang,F.-J., Hsia,C.C.

SPIE - The International Society for Optical Engineering

Yim,D., Kim,H.-S., Baik,K.-H.

SPIE-The International Society for Optical Engineering

Yim,D., Lim,C.-M., Kim,H.-S., Baik,K.-H.

SPIE-The International Society for Optical Engineering

Yasuzato,T., Ishida,S., Shioiri,S., Tanabe,H., Kasama,K.

SPIE-The International Society for Optical Engineering

Gehoel-van Ansem,W., Zandbergen,P., de,Klerk,J.

SPIE-The International Society for Optical Engineering

Yan,P., Langston,J.C.

SPIE-The International Society for Optical Engineering

Shiau,W.-T., Hu,J.C., Rodder,M., Tiner,P., Chen,I.-C.

SPIE-The International Society for Optical Engineering

Deleporte,A.G., Allgair,J., Archie,C.N., Banke,G.W., Postek,M.T., Schlesinger,J.E., Vladar,A.E., Yanof,A.W.

SPIE - The International Society for Optical Engineering

Chao,C.-P., Kittl,J.A., Hong,Q.-Z., Shiau,W.-T., Rodder,M., Chen,I.-C.

SPIE-The International Society for Optical Engineering

Mehrotra,M., Hu,J.C., Nandakumar,M., Chattenee,A., Rodder,M., Chen,I.-C.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12