1.

Conference Proceedings

Conference Proceedings
Wang,C.-M. ; Lai,C.-W. ; Huang,J. ; Liu,H.-Y.
Pub. info.: Optical Microlithography XIV.  4346  pp.452-463,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings

Conference Proceedings
Chang,C.-H. ; Tzu,S.-D. ; Hsieh,C.-H. ; Dai,C.M. ; Lin,B.J. ; Lin,C.-H. ; Liu,H.-Y.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.368-378,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
3.

Conference Proceedings

Conference Proceedings
Wu,S.-P. ; Liu,H.-Y. ; Chang,F.-C. ; Karklin,L.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.485-491,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546
4.

Conference Proceedings

Conference Proceedings
Fritze,M. ; Burns,J.M. ; Wyatt,P.W. ; Astolfi,D.K. ; Forte,T. ; Yost,D. ; Davis,P. ; Curtis,A.V. ; Preble,D.M. ; Cann,S.G. ; Denault,S. ; Liu,H.-Y. ; Shaw,J.C. ; Sullivan,N.T. ; Mastovich,M.E.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.388-407,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
5.

Conference Proceedings

Conference Proceedings
Liu,H.-Y. ; Karklin,L. ; Wang,Y.-T. ; Pati,Y.C.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.2-14,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
6.

Conference Proceedings

Conference Proceedings
Conley,W. ; Babcock,C.P. ; Farrar,N.R. ; Liu,H.-Y. ; Peterson,B. ; Taira,K.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.357-365,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
7.

Conference Proceedings

Conference Proceedings
Liu,H.-Y. ; Schulze,S. ; Thomas,A.C. ; McGuire,A.E. ; Cross,M.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  4181  pp.87-98,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181
8.

Conference Proceedings

Conference Proceedings
Liu,H.-Y. ; Wu,C. ; Li,X.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1379-1382,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
9.

Conference Proceedings

Conference Proceedings
Gleason,R.E. ; Liu,H.-Y.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.266-274,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
10.

Conference Proceedings

Conference Proceedings
Liu,H.-Y. ; Karklin,L. ; Wang,Y.-T. ; Pati,Y.C.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.328-337,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236