1.

Conference Proceedings
Conference Proceedings
1. In Situ Chemical Concentration Monitoring and Control of HF Oxide Etch Processes
Lindquist, P.G. ; Butler, J.N. ; Jarvis, T.D. ; Kelly, J.D. ; Hall, R.M. ; Rosato, J.J.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.277-282,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33
2.

Conference Proceedings
Conference Proceedings
2. Surface Photovoltage Characterization of Heavy Metal Contamination and Wafer Cleaning Efficiency in Wet Chemical Processes
Rosato, J.J. ; Hall, R.M. ; Parry, T.B. ; Kelly, J.D. ; Butler, J.N. ; Jarvis, T.D. ; Lindquist, P.G.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.163-170,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33