Ho, J. ; Wang, Y. ; Hou, Y.-C. ; Lin, B. S.-M. ; Yu, C. C. ; Wu, K. ; Ma, C.
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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560C-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hsu, R. H. ; Huang, I. H. ; Lin, L. C. ; Lin, B. S.-M.
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Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.572-583, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Fang, S. P. ; Yang, H. ; Chang, H. ; Chiang, P. ; Lin, B. S.-M. ; Hung, K.-C.
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Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1367-1376, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Tseng, H. T. ; Lin, L.-C. ; Huang, I. H. ; Lin, B. S.-M. ; Huang, C.-C. K. ; Huang, C.-J.
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Metrology, Inspection, and Process Control for Microlithography XIX. pp.156-162, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering