1.

Conference Proceedings

Conference Proceedings
Ho, J. ; Wang, Y. ; Hou, Y.-C. ; Lin, B. S.-M. ; Yu, C. C. ; Wu, K. ; Ma, C.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560C-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings

Conference Proceedings
Hsu, R. H. ; Huang, I. H. ; Lin, L. C. ; Lin, B. S.-M.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.572-583,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
3.

Conference Proceedings

Conference Proceedings
Fang, S. P. ; Yang, H. ; Chang, H. ; Chiang, P. ; Lin, B. S.-M. ; Hung, K.-C.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1367-1376,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
4.

Conference Proceedings

Conference Proceedings
Tseng, H. T. ; Lin, L.-C. ; Huang, I. H. ; Lin, B. S.-M. ; Huang, C.-C. K. ; Huang, C.-J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.156-162,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752