1.

Conference Proceedings

Conference Proceedings
Ye, Q. ; Limb, Y. ; Berry, W. ; Li, Y. ; Do Thanh, L. ; Rengarajan, R. ; Tonti, W.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.301-310,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings

Conference Proceedings
Limb, Y. ; Nguyen, B.Y. ; Tobin, P.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.409-415,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
3.

Conference Proceedings

Conference Proceedings
Saenger, K.L. ; Andricacos, P.C. ; Athavale, S.D. ; Baniecki, J.D. ; Cabral, C., Jr. ; Costrini, G. ; Kwietniak, K.T. ; Laibowitz, R.B. ; Lian, J.J. ; Limb, Y. ; Neumayer, D.A. ; Wise, M.L.
Pub. info.: Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 655