1.
Conference Proceedings
Ye, Q. ; Limb, Y. ; Berry, W. ; Li, Y. ; Do Thanh, L. ; Rengarajan, R. ; Tonti, W.
Pub. info.:
ULSI process integration : proceedings of the first international symposium . pp.301-310, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-18
2.
Conference Proceedings
Limb, Y. ; Nguyen, B.Y. ; Tobin, P.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing . pp.409-415, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-7
3.
Conference Proceedings
Saenger, K.L. ; Andricacos, P.C. ; Athavale, S.D. ; Baniecki, J.D. ; Cabral, C., Jr. ; Costrini, G. ; Kwietniak, K.T. ; Laibowitz, R.B. ; Lian, J.J. ; Limb, Y. ; Neumayer, D.A. ; Wise, M.L.
Pub. info.:
Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A. . 2001. Warrendale, Pa.. Materials Research Society
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
655