Liberation of Ion Implanted Ge Nanocrystals From a Silicon Dioxide Matrix via Hydrofluoric Acid Vapor Etching
- Author(s):
Sharp, I. D. Xu, Q. Liao, C. Y. Ager III, J. W. Beeman, J. W. Yu, K. M. Zakharov, D. Lilienta-Weber, Z. Haller, E. E. - Publication title:
- Nanostructuring materials with energetic beams : symposium held April 22-23, 2003, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 777
- Pub. Year:
- 2003
- Page(from):
- 33
- Page(to):
- 40
- Pages:
- 8
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997141 [1558997148]
- Language:
- English
- Call no.:
- M23500/777
- Type:
- Conference Proceedings
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