1.

Conference Proceedings
Conference Proceedings
1. Scaling self-aligned contacts for 0.25ｦﾌ m and below
Perera,A. ; Pfiester,J.R. ; Lii,T. ; Feng,C. ; Bhat,M. ; Dao,T. ; Molloy,J. ; Blackwell,M. ; J. Cecil,
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.171-175,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
2.

Conference Proceedings
Conference Proceedings
2. Integration of ultrathin resist processes into MPU IC manufacturing flows
Cobb,J.L. ; Conley,W. ; Guenther,T. ; Huang,F. ; Lee,J.J. ; Lii,T. ; Dakshina-Murthy,S. ; Parker,C. ; Usmani,S. ; Wu,W. ; Hector,S.D.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.261-272,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345