1.

Conference Proceedings

Conference Proceedings
Liateni,K. ; Moulinier,D. ; Affour,B. ; Boutamine,H. ; Karam,J.M. ; Veychard,D. ; Courtois,B. ; Cao,A.D.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.161-170,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings

Conference Proceedings
Liateni,K. ; Lee,H.J. ; Maher,M.A. ; Karam,J.M.
Pub. info.: Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France.  pp.188-192,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4019