1.

Conference Proceedings

Conference Proceedings
Knowlton, W.B. ; Walton, J.T. ; Lee, J.S. ; Lewak, D. ; Wong, Y.K. ; Haller, E.E.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.324-336,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4
2.

Conference Proceedings

Conference Proceedings
Walton, J.T. ; Lee, J.S. ; Lewak, D. ; Wong, Y.K. ; Cummings, A.C. ; Mewaidt, R.A. ; Wiedenbeck, M.E. ; Knowlton, W.B. ; Haller, E.E.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.407-421,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13