1.

Conference Proceedings
Conference Proceedings
1. In-situ Rapid Thermal N20 Oxidation of NH3-Nitrided Si for Ultrathin Nitride/Oxide Stack Gate Formation
Kim, Y.H. ; Song, S.C. ; Luan, H.F. ; Gelpey, J.C. ; Kepton, A. ; Levy, S. ; Bloom, R. ; Kwong, D.-L.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.239-246,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
2.

Conference Proceedings
Conference Proceedings
2. Integrated Rapid Thermal CVD Processing Solutions For 0.18-0.25 ｦﾌm Technologies
Gilboa, H. ; Gilboa, Y. E. ; Atzmon, Z. ; Levy, S. ; Spilberg, H. ; Bransky, E. ; Doitel, Z. ; Thakur, R. P. S. ; Weimer, R. A. ; DeBoer, S. ; Pan, J.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.215-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
3.

Conference Proceedings
Conference Proceedings
3. In Situ Wafer Cleaning Prior to Selective Hemispherical Grain (HSG) Polysilicon Deposition Using RT-CVD
Brosilow, B. J. ; Levy, S. ; Gilboa, Y. E.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.365-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
4.

Conference Proceedings
Conference Proceedings
4. Ion Exchange and Dehydration Effects on Potassium and Argon Contents of Clinoptilolite
WoldeGabriel, G. ; Levy, S.
Pub. info.: Scientific basis for nuclear waste management XIX : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.791-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 412