1.

Conference Proceedings

Conference Proceedings
Levenson, M.D. ; Ebihara, T.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.288-297,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings

Conference Proceedings
Levenson, M.D. ; Dai, G. ; Ebihara, T.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.1293-1303,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings

Conference Proceedings
Levenson, M.D. ; Tan, S.M. ; Dai, G. ; Morikawa, Y. ; Hayashi, N. ; Ebihara, T.
Pub. info.: Optical Microlithography XVI.  Part One  pp.344-370,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
4.

Conference Proceedings

Conference Proceedings
Desai, S. ; Edihara, T. ; Levenson, M.D. ; White, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.884-891,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
5.

Conference Proceedings

Conference Proceedings
Ebihara, T. ; Levenson, M.D. ; Liu, W. ; He, J. ; Yeh, W. ; Ahn, S. ; Oga, T. ; Shen, M. ; M'saad, H.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.985-994,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
6.

Conference Proceedings

Conference Proceedings
Levenson, M.D. ; Ebihara, T. ; Morikawa, Y. ; Hayashi, N.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.93-102,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
7.

Conference Proceedings

Conference Proceedings
Levenson, M.D. ; Ebihara, T.J. ; Reilly, M. ; Barclay, G. ; Vorha, V. ; Stafford, C. ; Mastovich, M.E. ; Morikawa, Y. ; Hayashi, N.
Pub. info.: Optical Microlithography XVII.  pp.1237-1246,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377