1.

Conference Proceedings

Conference Proceedings
Ronse, K. ; Vandenberghe, G. ; Hendrickx, E. ; Leunissen, L. H. A. ; Aksenov, Y.
Pub. info.: EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany.  pp.6-12,  2005.  Bellingham, Wash.,.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5835
2.

Conference Proceedings

Conference Proceedings
Yoshizawa, M. ; Philipsen, V. ; Leunissen, L. H. A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.243-251,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
3.

Conference Proceedings

Conference Proceedings
Cangemi, M. ; Philipsen, V. ; Leunissen, L. H. A. ; Taylor, D.
Pub. info.: Photomask Technology 2006.  pp.63490L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
4.

Conference Proceedings

Conference Proceedings
Yoshizawa, M. ; Philipsen, V. ; Leunissen, L. H. A.
Pub. info.: Optical Microlithography XIX.  pp.61541E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
5.

Conference Proceedings

Conference Proceedings
van de Kerkhof, M. ; de Boeij, W. ; Demarteau, M. ; Geh, B. ; Leunissen, L. H. A. ; Martin, P. ; Cangemi, M.
Pub. info.: Optical Microlithography XIX.  pp.615444-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
6.

Conference Proceedings

Conference Proceedings
Geh, B. ; Flagello, D. G. ; Pregler, C. ; Martin, P. M. ; Leunissen, L. H. A. ; Hansen, S. ; de Boeij, W.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599210-599210,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
7.

Conference Proceedings

Conference Proceedings
Lorusso, G. F. ; Leunissen, L. H. A. ; Gustin, C. ; Mercha, A. ; Jurczak, M. ; Marchman, H. M. ; Azordegan, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520W-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152