1.

Conference Proceedings

Conference Proceedings
Leskela, M. ; Niinisto, L. ; Nykanen, E. ; Soininen, P. ; Tiitta, M.
Pub. info.: Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A..  pp.315-320,  1991.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 222
2.

Conference Proceedings

Conference Proceedings
Duenas, S. ; Castan, H. ; Garcia, H. ; Bailon, L. ; KuKli, K. ; Ritala, M. ; Leskela, M.
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.287-299,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
3.

Conference Proceedings

Conference Proceedings
Raeisaenen, P.I. ; Kukli, K. ; Rahtu, A. ; Ritala, M. ; Leskela, M.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.623-628,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
4.

Conference Proceedings

Conference Proceedings
Kukli, K. ; Ritala, M. ; Leskela, M.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1137-1144,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
5.

Conference Proceedings

Conference Proceedings
Leskela, M. ; Aaltonen, T. ; Hamalainen, J. ; Niskanen, A. ; Ritala, M.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.545-554,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
6.

Conference Proceedings

Conference Proceedings
Wolborski, M. ; Bakowski, M. ; Pore, V. ; Ritala, M. ; Leskela, M. ; Schoner, A. ; Hallen, A.
Pub. info.: Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy.  pp.701-704,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 483-485
7.

Conference Proceedings

Conference Proceedings
Duenas, S. ; Castan, H. ; Garcia, H. ; Barbolla, J. ; Kukli, K. ; Ritala, M. ; Leskela, M.
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.147-152,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786
8.

Conference Proceedings

Conference Proceedings
Ritala, M. ; Leskela, M.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.479-490,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8