Leskela, M. ; Niinisto, L. ; Nykanen, E. ; Soininen, P. ; Tiitta, M.
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Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.. pp.315-320, 1991. Pittsburgh. Materials Research Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1137-1144, 1997. Pennington, NJ. Electrochemical Society
Leskela, M. ; Aaltonen, T. ; Hamalainen, J. ; Niskanen, A. ; Ritala, M.
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EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.545-554, 2005. Pennington, NJ. Electrochemical Society
Wolborski, M. ; Bakowski, M. ; Pore, V. ; Ritala, M. ; Leskela, M. ; Schoner, A. ; Hallen, A.
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Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy. pp.701-704, 2005. Uetikon-Zuerich. Trans Tech Publications
Duenas, S. ; Castan, H. ; Garcia, H. ; Barbolla, J. ; Kukli, K. ; Ritala, M. ; Leskela, M.
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Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.. pp.147-152, 2004. Warrendale, Pa.. Materials Research Society