1.

Conference Proceedings

Conference Proceedings
Racette,K.C. ; Williams,C.T. ; Lercel,M.J.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.883-892,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
2.

Conference Proceedings

Conference Proceedings
Magg,C. ; Lercel,M.J. ; Lawliss,M. ; Kwong,R.W. ; Huang,W.-S. ; Angelopoulos,M.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  4186  pp.707-716,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
3.

Conference Proceedings

Conference Proceedings
Fisch,E. ; Kindt,L. ; Lercel,M.J. ; Schmidt,M.R.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.480-485,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
4.

Conference Proceedings

Conference Proceedings
Magg,C. ; Lercel,M.J. ; Lawliss,M. ; Ackel,R. ; Caldwell,N. ; Kindt,L. ; Racette,K.C. ; Williams,C. ; Reu,P.L.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  4343  pp.374-382,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
5.

Conference Proceedings

Conference Proceedings
Faure,T.B. ; Huynh,C. ; Lercel,M.J. ; Smith,A. ; Wagner,T.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.68-78,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
6.

Conference Proceedings

Conference Proceedings
Pettibone,D.W. ; Bareket,N. ; Liang,T. ; Stivers,A.R. ; Hector,S.D. ; Mangat,P.J.S. ; Resnick,D.J. ; Lercel,M.J. ; Lawliss,M. ; Magg,C. ; Novembre,A.E. ; Farrow,R.C.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  4186  pp.241-249,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
7.

Conference Proceedings

Conference Proceedings
Brooks,C.J. ; Racette,K.C. ; Lercel,M.J. ; Powers,L.A. ; Benoit,D.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.14-23,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
8.

Conference Proceedings

Conference Proceedings
Krasnoperova,A.A. ; Rippstein,R.P. ; Flamholz,A.L. ; Kratschmer,E. ; Wind,S. ; Brooks,C.J. ; Lercel,M.J.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.24-39,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
9.

Conference Proceedings

Conference Proceedings
Lercel,M.J. ; Brooks,C.J. ; Racette,K.C. ; Magg,C. ; Lawliss,M. ; Caldwell,N. ; Jeffer,R. ; Collins,K.W. ; Barrett,M. ; Nash,S.C. ; Trybendis,M.J. ; Bouchard,L.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.804-813,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
10.

Conference Proceedings

Conference Proceedings
Rocque,J.M. ; Lercel,M.J. ; Brooks,C.J. ; Henry,R.W. ; Benoit,D.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.46-55,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676