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Indentation hardness and modulus of the surface of a large super-polished single crystal silicon sphere

Author(s):
Publication title:
Optical materials and structures technologies :4-7 August 2003, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5179
Pub. Year:
2003
Page(from):
215
Page(to):
222
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450524 [0819450529]
Language:
English
Call no.:
P63600/5179
Type:
Conference Proceedings

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