1.

Conference Proceedings

Conference Proceedings
Peka,P. ; Lehr,M.U. ; Dziesiaty,J. ; Muller,S. ; Kreissl,J. ; Rudolph,P. ; Schulz,H.-J.
Pub. info.: Proceedings of the 17th International Conference on Defects in Semiconductors : ICDS-17, Gmunden, Austria, July 18-23, 1993.  Pt.1  pp.435-440,  1994.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 143-147
2.

Conference Proceedings

Conference Proceedings
Kreissl,J. ; Irmscher,K. ; Peka,P. ; Lehr,M.U. ; Schulz,H.-J. ; Pohl,U.W.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.773-778,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
3.

Conference Proceedings

Conference Proceedings
Schmidbauer,S. ; Spinler,S. ; Lehr,M.U. ; Klotzsche,J. ; Hahn,J.
Pub. info.: Multilevel Interconnect Technology III.  pp.148-158,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3883