1.

Conference Proceedings
Conference Proceedings
1. CHEMICAL VAPOR DEPOSITION OF COPPER FROM AN ORGANOMETALLIC SOURCE
Beach, David B. ; Kane, William F. ; Legoues, Francoise K. ; Knors, Christopher J.
Pub. info.: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.73-78,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 181
2.

Conference Proceedings
Conference Proceedings
2. *ERBIUM-DOPED SILICON PREPARED BY UHV/CVD
Beach, David B. ; Collins, Reuben T. ; Legoues, Francoise K. ; Chu, Jack O.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.397-404,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282