Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 1 pp.554-561, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
International Conference on Optical Diagnosis of Materials and Devices for Opto-, Micro-, and Quantum Electronics : 13-15 May 1997, Kiev, Ukraine. pp.202-212, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.795-802, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California. pp.460-469, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA. Part2 pp.818-826, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part1 pp.723-733, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
A collection of technical papers : 17th AIAA Applied Aerodynamics Conference, Norfolk, Virginia 28 June-1 July, 1999. pp.422-432, 1999. Reston, VA. American Institute of Aeronautics and Astronautics
A collection of technical papers : 17th AIAA Applied Aerodynamics Conference, Norfolk, Virginia 28 June-1 July, 1999. pp.71-79, 1999. Reston, VA. American Institute of Aeronautics and Astronautics