1.

Conference Proceedings

Conference Proceedings
Lee, L. J. ; Lee, Y. M. ; Yang, Y. S.
Pub. info.: Plastics-pioneering the 21st century : conference proceedings.  pp.719-723,  1987.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 33
2.

Conference Proceedings

Conference Proceedings
Yang, D. S. ; Jung, M. H. ; Lee, Y. M. ; Koh, C. W. ; Yeo, G. S. ; Woo, S. G. ; Cho, H. K. ; Moon, J. T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152