1.

Conference Proceedings
Conference Proceedings
1. OBSERVATION OF THE Ga SELF-INTERSTITIAL DEFECT IN GaP
Lee, K. M.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.449-456,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
2.

Conference Proceedings
Conference Proceedings
2. MATERIAL AND DEVICE PROPERTIES ON 3" DIAMETER GaAs-ON-Si WITH BURIED P--TYPE LAYERS
Pearton, S. J. ; Lee, K. M. ; Haegel, N. M. ; Huang, c.-J. ; Nakahara, S. ; Ren. F. ; Scarpelli, V. ; Short, K. T. ; Vernon, S. M.
Pub. info.: Advances in materials, processing, and devices in III-V compound semiconductors.  pp.317-322,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 144
3.

Conference Proceedings
Conference Proceedings
3. THE EFFECT OF UNIAXIAL STRESS ON THE INFRARED ABSORPTION BANDS DUE TO THE OXYGEN DONOR IN SILICON
Stavola, M. ; Lee, K. M. ; Freeland, P.E. ; Kimerling, L. C.
Pub. info.: Microscopic identification of electronic defects in semiconductors : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.257-262,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 46
4.

Conference Proceedings
Conference Proceedings
4. *DEFECT STRUCTURE AND PROPERTIES BY JUNCTION SPECTROSCOPY
Kimerling, L. C. ; Benton,. J. L. ; Lee, K. M. ; Stavola, M.
Pub. info.: Microscopic identification of electronic defects in semiconductors : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.3-12,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 46
5.

Conference Proceedings
Conference Proceedings
5. Studies of Electrical Polarization Fatigue in SrBi2Ta2O9 Thin Films
Lee, K. M. ; Thomas, D. ; Kim, S. H. ; Maria, J. P. ; Kingon, A. I. ; Jang, H. M.
Pub. info.: Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.241-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 541
6.

Conference Proceedings
Conference Proceedings
6. CD metrology of binary and phase shift masks using scatterometry [5992-55]
Lee, K. M. ; Yedur, S. ; Tabet, M. ; Tavassoli, M.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921I-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
7.

Conference Proceedings
Conference Proceedings
7. Magnetron reactive sputtering of TaN and TaON films for EUV mask applications [5992-84]
Lee, K. M. ; Tavassoli, M. ; Stivers, A. ; Liebermann, B.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59922B-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
8.

Conference Proceedings
Conference Proceedings
8. CD-etch depth measurement from advanced phase-shift masks and wafers using optical scatterometry [6152-63]
Lee, K. M. ; Yedur, S. ; Henrichs, S. ; Tavassoli, M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152