1.

Conference Proceedings
Conference Proceedings
1. Inductively-Coupled Plasma Deposition of Low Temperature Silicon Dioxide and Silicon Nitride Films for III-V Applications
Mackenzie, K.D. ; Lee, J.W ; Johnson, D.J.
Pub. info.: Proceedings of the State-of-the-Art Program on Compound Semiconductors (SOTAPOCs XXX).  pp.1-12,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-4
2.

Conference Proceedings
Conference Proceedings
2. Comparison of ICI and IBr Plasma Chemistries for Etching of InGaAlP Alloys
Hong, J. ; Lee, J.W ; Lambers, E.S. ; Abernathy, C.R ; Pearton, S.J. ; Constantine, C. ; Hobson, W.S.
Pub. info.: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV).  pp.56-64,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-15