1.

Conference Proceedings
Conference Proceedings
1. Polymer structure modifications for immersion leaching and watermark control [6153-77]
Lee, J W ; Oh, S K ; Kim, J W ; Lee, S H ; Jeong, Y H ; Kim, S S ; Park, M H ; Kim, D ; Kim, J ; Lee, G ; Moon, S C
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.615311-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
2.

Conference Proceedings
Conference Proceedings
2. Analysis of 193-nm immersion specific defects [6153-62]
Otoguro, A ; Lee, J W ; Itani, T ; Fujii, K ; Funakoshi, T ; Sakai, T ; Watanabe, K ; Arakawa, M ; Nakano, H ; Kobayashi, M
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61531P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153