1.

Conference Proceedings
Conference Proceedings
1. Hybrid nanocontact printing (HnCP) process technology
Jo, J. ; Jeong, J.-H. ; Kim, K.-Y. ; Lee, E.-S. ; Choi, C.-G.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.372-378,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
2.

Conference Proceedings
Conference Proceedings
2. Improved characteristics of rainbow defects with novel wafer edge exposure technique
Shim, K.-C. ; Kim, M.-S. ; Lee, E.-S. ; Lee, C.-S. ; Gil, M.-G. ; Kim, B.-H. ; In, J.-S. ; Yoon, T.-B. ; Kim, J.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.919-926,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689