1.

Conference Proceedings

Conference Proceedings
Lee, J.-S. ; Kim, C.-S. ; Yim, O.Y. ; Lee, D.-H.
Pub. info.: 9th Congress of the International Colour Association.  pp.158-161,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4421
2.

Conference Proceedings

Conference Proceedings
Yoon, S.-Y. ; Choi, S.-J. ; Kim, Y.-D. ; Lee, D.-H. ; Cha, H.-S. ; Kim, J.-M. ; Choi, S.-S. ; Jeong, S.H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.332-340,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
3.

Conference Proceedings

Conference Proceedings
Choi, S.-J. ; Cha, H.-S. ; Yoon, S.-Y. ; Kim, Y.-D. ; Lee, D.-H. ; Kim, J.-M. ; Kim, J.-S. ; Min, D.-S. ; Jang, P.-J. ; Chang, B.-S. ; Kwon, H.-J. ; Choi, B.-Y. ; Choi, S.-S. ; Jeong, S.H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.303-311,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
4.

Conference Proceedings

Conference Proceedings
Jeong, C.-Y. ; Lee, J. ; Park, K.-Y. ; Lee, W.G. ; Lee, D.-H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.747-755,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
5.

Conference Proceedings

Conference Proceedings
Shin, D.-U. ; Jeong, Y.-B. ; Park, J.-L. ; Choi, J.-S. ; Lee, J.-G. ; Lee, D.-H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.415-427,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
6.

Conference Proceedings

Conference Proceedings
Jeong, W.-G. ; Kim, D.-W. ; Park, C.-M. ; An, K.-W. ; Lee, D.-H. ; Kim, J.-M. ; Choi, S.-S. ; Jeong, S.H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.597-605,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
7.

Conference Proceedings

Conference Proceedings
Koh, C.-W. ; Lee, D.-H. ; Kim, M.-S. ; Park, S.-N. ; Kwon, W.-T.
Pub. info.: Advances in resist technology and processing XX.  2  pp.1382-1389,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
8.

Conference Proceedings

Conference Proceedings
Kim, D. ; Kim, H.-J. ; Cho, S.-H. ; Lee, D.-H. ; Im, K.-H. ; Yoo, M.-J. ; Lee, S.-H. ; Kim, J. ; Kim, J.-S. ; Kim, H.-S.
Pub. info.: Advances in resist technology and processing XX.  2  pp.1086-1097,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
9.

Conference Proceedings

Conference Proceedings
Jeong, C.-Y. ; Park, K.-Y. ; Choi, J.S. ; Lee, J.G. ; Lee, D.-H.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.1067-1078,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
10.

Conference Proceedings

Conference Proceedings
Chung, Y.-S. ; Kim, H.-J. ; Cho, S.-H. ; Lee, D.-H. ; Im, K.-H. ; Yim, Y.-G. ; Kim, D.-B. ; Kim, J.-Y.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.660-670,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690