1.

Conference Proceedings
Conference Proceedings
1. EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS
Bae, K-M. ; Kim, J-R. ; Hong, Y-K. ; So, S-I. ; Lee, S-C. ; Kim, S-S. ; Ha, S-W. ; Koh, C-G. ; Pyi, S-H. ; Lee, D-M.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.786-792,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. Correlat ion of Substrate D-Defects in CZ Silicon with MOS Breakdown
Park, J-G. ; Kirk, H. ; Lee, C-S. ; Lee, H-K. ; Lee, D-M. ; Rozgonyi, G.A.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.57-71,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1
3.

Conference Proceedings
Conference Proceedings
3. EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS
Bae, K-M. ; Kim, J-R. ; Hong, Y-K. ; So, S-I. ; Lee, S-C. ; Kim, S-S. ; Ha, S-W. ; Koh, C-G. ; Pyi, S-H. ; Lee, D-M.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.786-792,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2