Optoelectronic interconnects VI : 27-29 January 1999, San Jose, California. pp.339-345, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA. pp.298-309, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.315-326, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering