1.

Conference Proceedings
Conference Proceedings
1. Symmetry enhancement method for process modeling and its applications in IC design and OPC
Lei, J.J. ; Sanie, M. ; Lay, D.K.H.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.465-470,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Filtering noisy data for T-less model calibration
Lei, J. ; Lay, D.K.H.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.879-886,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889