THE PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION
- Author(s):
Williams, J. S. Chivers, D. J. Elliman, R. G. Johnson, S. T. Lawson, E. M. Mitchell, I. V. Orrman-Rossiter, K. G. Pogany, A> P. Short, K. T. - Publication title:
- Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 27
- Pub. Year:
- 1984
- Page(from):
- 205
- Page(to):
- 210
- Pages:
- 6
- Pub. info.:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444008695 [0444008691]
- Language:
- English
- Call no.:
- M23500/27
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
SOLID SOLUSILITY OF Sb AND Te IMPLANTED GaAs FOLLOWING SOLID PHASE ANNEALING
North-Holland |
North-Holland |
Materials Research Society |
North-Holland |
3
Conference Proceedings
AMORPHOUS TO CRYSTALLINE PHASE TRANSFORMATIONS IN HIGH DOSE ION IMPLANTED SILICON
Materials Research Society |
Materials Research Society |
North-Holland |
10
Conference Proceedings
ION BEAM INDUCED AMORPHIZATION AND CRYSTALLIZATION PROCESSES IN SILICON AND GaAs
Materials Research Society |
North Holland |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |